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Highly robust SiCOH/mesoporous SiO2 ultralow dielectric films with heterostructures
Year of publication 2014
Title of paper Highly robust SiCOH/mesoporous SiO2 ultralow dielectric films with heterostructures
Author Jong-Min Park, Kyoung Hwan Kim, Cheng Jin An, Ming Liang Jin, Jun-Hee Hahn, Byung-Seon Kong and Hee-Tae Jung
Publication in journal RSC Advances, 4, 28409-28416
Status of publication published
링크
   http://pubs.rsc.org/en/Content/ArticleLanding/2014/RA/c4ra03604b#!divA… [125]