2014
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Year of publication | 2014 | ||||
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Title of paper | Highly robust SiCOH/mesoporous SiO2 ultralow dielectric films with heterostructures | ||||
Author | Jong-Min Park, Kyoung Hwan Kim, Cheng Jin An, Ming Liang Jin, Jun-Hee Hahn, Byung-Seon Kong and Hee-Tae Jung | ||||
Publication in journal | RSC Advances, 4, 28409-28416 | ||||
Status of publication | published | 링크 |
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