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Year of publication | 2019 | ||||
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Title of paper | Polybenzoxazole/graphene nanocomposite for etching hardmask | ||||
Author | Seung-Wook Shin, Jong Seon Kim, Seon Joon Kim, Dae Woo Kim, and Hee-Tae Jung | ||||
Publication in journal | Journal of Industrial and Engineering Chemistry, 75, 296–303 | ||||
Status of publication | published | 링크 |
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