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Year of publication | 2013 | ||||
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Title of paper | Fabricatioin of complex 3-dimensional patterned structures on a ~10nm scale from a single master pattern by secondary sputtering lithography | ||||
Author | Hwan-Jin Jeon, Hae-Wook Yoo, Eun Hyung Lee, Sung Woo Jang, Jong-Seon Kim, Jong Kil Choi and Hee-Tae Jung | ||||
Publication in journal | Nanoscale, 5, 2358-2363 | ||||
Status of publication | published | 링크 |
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