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Nanoporous SiCOH/CxHy dual phase films with an ultralow dielectric constant and a high Young's modulus
Year of publication 2013
Title of paper Nanoporous SiCOH/CxHy dual phase films with an ultralow dielectric constant and a high Young's modulus
Author Jong-Min Park, Jong Kil Choi, Cheng Jin An, Ming Liang Jin, Sangwoo Kang, Juyoung Yun, Byung-Seon Kong and Hee-Tae Jung
Publication in journal Journal of Materials Chemistry C, 1, 3414-3420
Status of publication published
링크
   http://pubs.rsc.org/en/Content/ArticleLanding/2013/TC/C3TC00587A#!divA… [133]