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Fabrication of 10nm-Scale Complex 3D Nano-Patterns with Multiple Shapes and Components by Secondary Sputtering Phenomenon
Year of publication 2014
Title of paper Fabrication of 10nm-Scale Complex 3D Nano-Patterns with Multiple Shapes and Components by Secondary Sputtering Phenomenon
Author Hwan-Jin Jeon, Hyeon Su Jeong, Yun Ho Kim, Woo-Bin Jung, Jeong Yeon Kim and Hee-Tae Jung
Publication in journal ACS nano , 8 (2), 1204-1212
Status of publication published
링크
   http://pubs.acs.org/doi/abs/10.1021/nn4037688 [211]