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Fabricatioin of complex 3-dimensional patterned structures on a ~10nm scale from a single master pattern by secondary sputtering lithography
Year of publication 2013
Title of paper Fabricatioin of complex 3-dimensional patterned structures on a ~10nm scale from a single master pattern by secondary sputtering lithography
Author Hwan-Jin Jeon, Hae-Wook Yoo, Eun Hyung Lee, Sung Woo Jang, Jong-Seon Kim, Jong Kil Choi and Hee-Tae Jung
Publication in journal Nanoscale, 5, 2358-2363
Status of publication published
링크
   http://pubs.rsc.org/en/Content/ArticleLanding/2013/NR/c3nr33739a#!divA… [139]