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Year of publication | 2014 | ||||
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Title of paper | Fabrication of 10nm-Scale Complex 3D Nano-Patterns with Multiple Shapes and Components by Secondary Sputtering Phenomenon | ||||
Author | Hwan-Jin Jeon, Hyeon Su Jeong, Yun Ho Kim, Woo-Bin Jung, Jeong Yeon Kim and Hee-Tae Jung | ||||
Publication in journal | ACS nano , 8 (2), 1204-1212 | ||||
Status of publication | published | 링크 |
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