PUBLICATION

KAIST OOEM Lab

Papers

2014 Highly robust SiCOH/mesoporous SiO2 ultralow dielectric films with heterostructures

본문

Author
Jong-Min Park, Kyoung Hwan Kim, Cheng Jin An, Ming Liang Jin, Jun-Hee Hahn, Byung-Seon Kong and Hee-Tae Jung
Journal
RSC Advances, 4, 28409-28416
Status
published
Year
2014