PUBLICATION

KAIST OOEM Lab

Papers

2014 Fabrication of sub-20nm nano-gap structures through the elastomeric nano-stamp assisted secondary sputtering phenomenon

본문

Author
Hwan-Jin Jeon, Eun Hyeong Lee, Hae-Wook Yoo, Kyoung Hwan Kim, and Hee-Tae Jung
Journal
Nanoscale , 6, 5953-5959
Status
published
Year
2014