PUBLICATION

KAIST OOEM Lab

Papers

2013 Fabricatioin of complex 3-dimensional patterned structures on a ~10nm scale from a single master pattern by secondary sputtering lithography

본문

Author
Hwan-Jin Jeon, Hae-Wook Yoo, Eun Hyung Lee, Sung Woo Jang, Jong-Seon Kim, Jong Kil Choi and Hee-Tae Jung
Journal
Nanoscale, 5, 2358-2363
Status
published
Year
2013