PUBLICATION

KAIST OOEM Lab

Papers

2013 Nanoporous SiCOH/CxHy dual phase films with an ultralow dielectric constant and a high Young's modulus

본문

Author
Jong-Min Park, Jong Kil Choi, Cheng Jin An, Ming Liang Jin, Sangwoo Kang, Juyoung Yun, Byung-Seon Kong and Hee-Tae Jung
Journal
Journal of Materials Chemistry C, 1, 3414-3420
Status
published
Year
2013