PUBLICATION

KAIST OOEM Lab

Papers

2014 Fabrication of 10nm-Scale Complex 3D Nano-Patterns with Multiple Shapes and Components by Secondary Sputtering Phenomenon

본문

Author
Hwan-Jin Jeon, Hyeon Su Jeong, Yun Ho Kim, Woo-Bin Jung, Jeong Yeon Kim and Hee-Tae Jung
Journal
ACS nano , 8 (2), 1204-1212
Status
published
Year
2014