PUBLICATION

KAIST OOEM Lab

Papers

2010 A new top-down approach for fabrication high-aspect-ratio complex nanostructures with 10 nm-scale features

본문

Author
Hwan-Jin Jeon, Kyoung Hwan Kim, Youn-Kyoung Baek, Dae Woo Kim and Hee-Tae Jung
Journal
Nano Letters , 10(9), 3604-3610 (2010)
Status
published
Year
2010