PUBLICATION

KAIST OOEM Lab

Papers

2019 Polybenzoxazole/graphene nanocomposite for etching hardmask

본문

Author
Seung-Wook Shin, Jong Seon Kim, Seon Joon Kim, Dae Woo Kim, and Hee-Tae Jung
Journal
Journal of Industrial and Engineering Chemistry, 75, 296–303
Status
published
Year
2019