Selective Deposition of Copper on Self-Assembled Block Copolymer Surfaces via Physical Vapor Deposition > Papers | [KAIST OOEM 연구실]

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2021 Selective Deposition of Copper on Self-Assembled Block Copolymer Surfaces via Physical Vapor Deposition

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Author: Sangho Lee†, Wonmoo Lee†, Hee-Tae Jung* and Caroline A. Ross*

Journal: ACS Appl. Mater. Interfaces, 13, 44, 52931–52937

Status: published

Year: 2021

관련링크

https://pubs.acs.org/doi/abs/10.1021/acsami.1c15272
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